Integrated Planar 6-DOF Nanopositioning System
نویسندگان
چکیده
منابع مشابه
Integrated Precision 3-DOF Position Sensor for Planar Linear Motors
Planar linear motors have been shown to be capable of fast accurate 2-DOF motions making them useful for assembly tasks. However, the lack of sensing capability has limited their applications. Previous planar motor sensors have been precise but bulky and sensed only a single direction of motion. We present a small integrated 3-DOF sensor capable of 0.2 m position resolution (1 ) which has been ...
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ژورنال
عنوان ژورنال: IFAC-PapersOnLine
سال: 2019
ISSN: 2405-8963
DOI: 10.1016/j.ifacol.2019.11.693